The Micro Actuator, Sensor, and System are dedicated to advance the state

of the art of micro- and nanofabrication, and advanced fabrication and

manufacturing technologies for sensors and applications.  Some recent

progresses on nano/micro-fabrication technology will be introduced in this talk.

Polymer materials are important for increasing performance and robustness of

microfabricated devices.  Microfabrication traditionally relies on silicon,

other semiconductor materials, and metals.  The result from our work has demonstrated

that many polymer materials, including thermalsets and thermalplasts, can be

successfully used in microfabricated devices.  In this talk, several applications

of sensing, including artificial haircell sensor and lateral line sensing

will be demonstrated.