Abstract：

Using an emerging surface nano-patterning technique – the UTAM (ultra-thin alumina mask) nano-patterning, large-scale ordered arrays of surface nanostructures (nanodots, nanoholes, free-standing nanowires and nanotubes) were fabricated on flat substrates. The UTAM nano-patterning and the resulting surface nanostructures have some interesting and advantageous features, such as highly defined and controllable size, shape, composition, and spacing of the nanostructures, large pattern area, high throughput and low equipment costs. In addition, the properties of the nanostructure arrays can be tuned based on the adjustment of the structural parameters of the nanostructure. All these features make the technique quite suitable to fabricate ordered surface nanostructures with potential applications in Bio- and Nano-devices.