报告题目: |
MEMS Research at MAT, TU Berlin |
报告人: |
Professor Ernst Obermeier |
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Professor and Director of Microsensor and Actuator Technology Center
Department of Electrical Engineering and Computer Science
Berlin University of Technology
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报告时间: |
2006-09-28 14:00 |
报告地点: |
清华大学精密仪器系四楼会议室 |
主办单位: |
精仪系 |
简介: |
The Microseusor&Actuator Technology Center(MAT) at TU Berlin has been working on MEMS(Microelectromechani-cal system) for almost twenty years. The main activities focus on micro-sensors, microactuators, FEM, simulation, process development, and training. In the presentation an overview will be given over the facilities available at MAT and the recent research activities including micro pressure sensors, micro accelerometer, gas microsensor, AENOMEMS, micro-shulter, micro-mirror, micro-relay, and inkjet printhead. |
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