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报告题目:
A Technology for Monolithic MEMS-CMOS Integration and its Application to the Realization of an Active-matrix Tactile Sensor
 报告人:
Prof. Man Wong (香港科技大学)
香港科技大学教授
报告时间:
2016-05-16 10:00
报告地点:
清华大学微电子所新所204会议室
主办单位:
清华大学微电子所
  简介:

From 1979 to 1984, he obtained his BS and MS degrees at the Massachusetts Institute of Technology. From 1985 to 1988, he obtained his PhD degree at the Center for Integrated Systems at Stanford University, where he worked on tungsten-gate MOS technology. From 1988 to 1992, he was with the Semiconductor Process and Design Center of Texas Instruments, USA and worked on the modeling and development of integrated-circuit metallization systems and dry/vapor surface-conditioning processes. He is currently with the Department of Electronic and Computer Engineering at the Hong Kong University of Science and Technology, Hong Kong.

His research interests include micro-fabrication technology, device structure and material; physics and technology of thin-film transistor; organic light-emitting diode display technology; modeling and implementation of integrated micro-systems; and thin-film solar cell device and process technology.

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