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摘要
The Micro and Nano Systems Initiative (MNSI) at National University of Singapore is an organization, hosted in the Department of Mechanical Engineering, for providing research focus and integration of research work in the area of micro and nano devices and systems, across various departments within the Faculty of Engineering. The research thrust areas include optical-MEMS, bio-MEMS, power-MEMS, MEMS/NEMS tribology, and micro/nano sensors and actuators. In this talk, I will first give an overview of the recent developments in the field of optical MEMS and nanophotonics within MNSI, and then focus on the following topics:
1. Tuning of nanophotonic cavity resonance using nanomechanics. Photonic micro/nanocavity resonator is one of the most important fundamental building blocks in modern photonic systems. Its applications include efficient and compact lasers, wavelength-selective add/drop multiplexers, optical filters, and high-sensitive sensors. Here, we demonstrate that its optical resonance can be tuned mechanically with low loss by perturbing the evanescent field of the cavity mode with an on-chip integrated nano actuator.
2. Rapid scanning of laser beams using MEMS-driven diffraction gratings. Micromirrors that utilize out-of-plane deflection of reflective surfaces to scan laser beams were mostly developed. However, it has already been identified that at high scan frequencies the micromirror plates may lose their rigidity and deform dynamically during scanning due to the excessive out-of-plane acceleration/de-acceleration forces, thus introducing dynamic aberrations in the optical scanning systems. Here, we will present our solution to the problem, namely using a MEMS-driven diffraction grating, and demonstrate its capability of scanning at tens of kHz without any noticeable dynamic deformation. We will also briefly discuss its application in pico laser projectors and imaging systems.
报告人简历：
Dr. Zhou received the B.Eng. and Ph.D. degrees in optical engineering from Zhejiang University, Hangzhou, China, in 1992 and 1997, respectively. He then joined Shanghai Jiao Tong University and subsequently Nanyang Technological University, Singapore as a postdoctoral fellow. He is currently an assistant professor with the Department of Mechanical Engineering, National University of Singapore. He has published more than 100 research papers in international journals and conferences. His main research interests include microoptics, diffractive optics, MEMS devices for optical applications, and nanophotonics.
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