The debate has heated up (again) in the past several years on whether Moore’s Law has reached the end of the road. Since Moore’s Law is not a physical law, it is subject to different interpretations. The speaker of this talk would like to provide a perspective on this topic by examining Moore’s Law from several different angles, including semiconductor technologies, the proliferation of IC applications, and the evolution of the IC fabrication ecosystem. A key component of the IC fabrication ecosystem - the yield management equipment and solutions, will be the focus of this talk. The challenges the IC industry is facing in yielding devices at 10nm and below technology nodes, yielding devices based on vertically integrated circuits, and the adoption of EUV lithography will be discussed, along with potential solutions the yield managementequipment providers could develop to counter these challenges. The talk will end with an overview of the R&D opportunities inside KLA-Tencor that are waiting for brave adventurers.

 

1980至 1987年于清华精仪系机械制造设备及自动化专业学习。获工学学士，硕士学位。

1987年留校，在精仪系机器人研究所任助教, 讲师。主要研究领域包括移动机器人控制系统及视觉导引；非线性控制系统的数字化实现；地型自适应步行机器人。

1992 年赴美留学。在加州大学河滨分校(University of California, Riverside)计算机系攻读博士。主要研究方向包括图像处理及计算机视觉，基于自然景物建模的人造物体识别，自组织映射神经网络算法。1994年获硕士学位。1995年休学并加入ETAK Inc.任软件工程师，参与开发第一代数字地图路径规划及导航系统。