In this talk, I will review our recent activities with our collaborators on designing and fabricating superconducting circuits integrating up to 20 qubits for scalable quantum information processing. In particular, I will introduce a superconducting quantum processor featuring 10 individually-accessible Xmon qubits that are controllably coupled to a bus resonator, based on which we deterministically produce the Greenberger-Horne-Zeilinger (GHZ) states with up to 10 qubits. The 10-qubit GHZ state, whose full information is obtained through tomographic measurement, represents the largest entangled state produced so far in solid state architectures. With the excellent control developed in our experiment, our multi-qubit superconducting circuits may provide a promising platform for simulating intriguing physics of quantum many-body systems.