ABSTRACT: MEMS is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology.  MEMS is an enabling technology allowing the development of smart products, augmenting the computational ability of microelectronics with the perception and control capabilities of microsensors and microactuators and expanding the space of possible designs and applications. NEMS are nanoscale machines forming essentially smaller scale microelectromechanical systems. NEMS typically integrate transistor-based nanoelectronics with mechanical actuators, pumps, motors, or physical, biological, and chemical sensors. Generally, systems have a lateral dimension below 100 nm.  This talk presents the state-of-the-art status of polymer for MEMS and NEMS.

报告人简介：
BIOGRAPHY: Tianhong Cui is currently a Tenured Professor of Mechanical Engineering and an Affiliate Senior Member of the graduate faculty in Department of Electrical & Computer Engineering at the University of Minnesota. He joined the faculty of the University of Minnesota in 2003. From 1995 to 2003, he held research or faculty positions at Tsinghua University, University of Minnesota, National Laboratory of Metrology in Japan, and Louisiana Tech University, respectively. He received his B.S. from Nanjing University of Aeronautics and Astronautics in 1991, and his Ph.D. from Chinese Academy of Sciences in 1995. 
His current research interests include MEMS/ NEMS and nanotechnology. He has more than 150 publications in MEMS and nanotechnology including over 40 peer-reviewed journal papers and 2 US patents for the last three years. His research has been sponsored by NSF, DARPA, NASA, DOE, etc. He received research awards including the STA & NEDO fellowships in Japan, the Alexander von Humboldt Fellowship in Germany, the Research Foundation Award from Louisiana Tech University, and the Richard & Barbara Endowed Chair from the University of Minnesota. He is a senior member of IEEE and a member of ASME. He is serving as an associate editor for Journal of Nanoscience & Nanotechnology and Journal of Nano Research (new journal).