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集成电路系列学术邀请报告第04期——先进光刻技术介绍
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报告题目:
Applications of computer generated holograms for optical testing and alignment
 报告人:
Jim Burge
Dr. Jim Burge is Associate Professor at the University of Arizona
with joint appointments at the College of Optical sciences 
and Steward Observatory
报告时间:
2007-07-16 09:00
报告地点:
精仪系四楼会议室
主办单位:
精仪系
  简介:

Computer generated holograms (CGHs) provide accurate and flexible references for optical measurements and for aligning optical systems.  A general treatment for design and analysis of CGHs is presented.  Particular applications for interferometric measurements of large aspheric surfaces and for alignment of non-axisymmetric systems are discussed.

      

 

 

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