This presentation covers first the foundation of a new faculty at the University in Freiburg, Germany, and gives some information about the curriculum in “Microsystem Technology”. Freiburg is the only university in Germany with a full curriculum in this field. Subsequently the presentation concentrates on the motivation of MEMS in general. In comparison with conventional technologies the assets (and drawbacks) of MEMS are pointed out. The different MEMS technologies are introduced and discussed. Some unconventional technologies to use steel as a material for MEMS are discussed. Typical examples of industrial and scientific applications are presented. Some suggestions for future MEMS applications will close the presentation.

The Faculty for Applied Sciences was founded about ten years ago at Freiburg University in Germany as a first Engineering Faculty on this location. The university at this time was mainly related to Human Sciences.  IMTEK is the acronym for “Institute of  Microsystem Technology” and is the major part of this new faculty. The presentation gives an overview about the research structure of the IMTEK and the curriculum for Microsystem Technology (MST). Freiburg University offers the first full curriculum for MST in Germany. Out of the manifold research activities of the institute some successful projects are selected and presented.