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报告摘要: Nonequilibrium plasmas (i.e., low-temperature plasma) driven by a radio-frequency (rf) between LF and UHF have been developed from the last quarter of the 20th century at a pace never experienced before, in order to open a new door to our technological world in our global, information-technology society. At present, we are waiting further for a scientific and technological breakthrough to operate low-temperature plasma sources being compact, environmentally friend, and, of course, high efficiency and accuracy. Under these circumstances, the basic concepts in the nonequilibrium rf-plasma and the intrinsic rf electron transport will be reviewed in this lecture. 报告人简介: Toshiaki Makabe received his BSc, MSc, and PhD degrees in electrical engineering all from Keio University, and took his job at the Department of Electrical Engineering as an Instructor in 1975. He became a Professor of Electronics and Electrical Engineering in the Faculty of Science and Technology at Keio University in 1991. He also served as a guest professor at POSTECH, Ruhr University Bochum, and Xi’an Jiaotong University, respectively. He was Dean of the Faculty of Science and Technology and Chair of the Graduate School from 2007 to 2009. He served as the Vice-President of Keio University in charge of research between May 2009 and May 2017. He was appointed to the Representative for International Affairs of the Research University 11 (RU11) of Japan in 2017. At present, he is a Professor Emeritus at Keio University and Emeritus member of JSAP. “论坛”主请人联系方式: 李和平 liheping@tsinghua.edu.cn
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