Dr. Stephen Daniels is Executive Director of the National Centre for Plasma Science and Technology (www.ncpst.ie) and a lecturer in the School of Electronic Engineering at Dublin City University. He leads a multidisciplinary research team in plasma technology and energy systems. He is Director of the Energy & Design Laboratory (energylab.eeng.dcu.ie) and the nanomaterials processing laboratory (www.eeng.dcu.ie/~npl).

Stephen is a Principal Investigator in the Science Foundation Ireland Funded 'Precision' Strategic Research Cluster (www.ncpst.ie/precision), an academic member of the Biomedical Diagnostics Institute (www.bdi.ie), and a Principal Investigator at the MESTECH Marine and Environmental Sensing Hub (http://dcu.ie/ncsr/Beaufort).

His primary scientific technical competence is in the area of plasma processing for integrated circuit manufacturing, thin film deposition techniques. He also has extensive experience in product design and development..

The lecture will discuss the design and manufacture of plasma manufacturing tools with an emphasis on enhancing processes capability through a reduction in variation. We will look at sensor and diagnostics strategies, process control, and the role of simulation in enhancing tool performance.

 

Notes: this seminar is related to the International Collaboration Innovation Team Project of Tsinghua University (清华大学重点学科高水平国际合作创新团队支持项目)