Atomic force microscopy (AFM) has been used as a nanopatterning tool for localized material deposition, removal, and modification for near two decades.  The recent development of these AFM-based techniques will be presented with the emphasis on the mechanical scratching and local anodic oxidation techniques.  The nanostructures made by these two techniques are specifically presented in order to illustrate the characteristics and uniqueness of these two techniques.  Examples of using these two schemes for patterning several nanoscale devices are also given to demonstrate their versatility and advancement.  Recommendations for future research to make the AFM-based techniques more controllable and to widen their applicability in nanofabrication are also addressed.